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The Mach One revolutionary mass flow controller (MFC) combines
sonic nozzle technology with an advanced digital control valve. This combination
of technologies significantly improves mass flow control performance and substantially
reduces product cost of ownership. The Mach One MFC's simple flow through design
and construction eliminates flow bypass accuracy errors, slow response times,
and potential clogging problems.
Features
- Feed forward control strategy
- Digital control valve
- Large diameter flow passage
- Pressure/temperature transducer with long term stability
rating of 0.25% per year
- Easy-to-use configuration software
Benefits
- High accuracy to ±0.5% of reading
- Precise control
- Increased long-term accuracy and stability
- Extends time between calibrations
- Significantly reduces inventory and setup time
- Reduces delivery system size
- Improves safety
Applications
The benefits obtained from the Mach One MFC apply to most gas
delivery systems. Below are a few examples of applications where the Mach One
is particularly well-suited:
- Ion implant
Where hazardous gases must be used without fear of external leakage; the Mach
One MFC enables the use of Safe Delivery Systems
- HDP-CVD and tungsten CVD(WF6)
Where fast response and no overshoot of setpoint are critical
- Reactive gases
Sonic nozzle technology is perfect for reactive and unstable gases like B2H6
- Atomic layer CVD
Where delivery speed and time to setpoint are critical
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