PrimAera Series

The PrimAera is a true digital MFC based on the foundation of Aera's proven MFC components that ensures precise gas flow and reliability. Aera's small diameter sensor is highly sensitive to changing gas conditions and is extremely quick to respond. The PrimAera's piezoelectric diaphragm seated control valve provides exceptionally fast response and reliability. The innovative control electronics supply improved response, accuracy and reliability while reducing power consumption. The core of the electronics is a Digital Signal Processor (DSP) operating at 30 MHz. The DSP processing power replaces conventional sensing and control circuits with a digital algorithm thereby improving MFC performance.

Features

• Metal seals
  
• Piezoelectric/diaphragm control valve
  
• Small diameter, fast-responding sensor
  
• All gas-wetted surfaces electropolished and ultracleaned
  
• Variety of electrical connectors available
  
• Accomodates all types of 1 1/2" and 1 1/8" surface mount interface designs as well as 1/4" VCR fittings
  

Benefits

• Settling Time:
  - Less than 1 second between setpoints
  - No overshoot or undershoot
  
• Gas Replacement Time: Equivalent to a straight tube
  
• Return Rate: Less than 0.5% within one year after shipment
  
• Zero Drift: Less than 0.5% of full-scale after one year